| 摘要 |
PURPOSE:To inspect the position of formation of a mask automatically by a method wherein each degree of density level is summed up in the region crossing the edge of the pattern to be used for positional inspection of the image obtained by a differential treatment, and the edge position of the pattern for positional inspection is worked out from the peak value of a secondary formula. CONSTITUTION:The position of a position detecting pattern 2 is recognized from image data by the main control part 22, the deviation in X-Y direction against the center of the visual field of an ITV camera 18 is worked out, the correction data of the shifting position is formed, and they are sent to a table control part 28. The image data are differentially treated by a differential summing section 23, and each edge of the pattern 2 for positional inspection and the image data of a metal film are obtained. The differential summing data is sent to an edge position detecting part 25 by the main control part 22. An interpolation is conducted using a secondary formula based on the differential summing data. Each edge position of the pattern in a summing-up region is computed by an edge position detecting section 24. As a result, the forming position of a mask can be inspected automatically. |
