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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH01180982(A)
申请公布日期
1989.07.18
申请号
JP19880005615
申请日期
1988.01.13
申请人
HITACHI ELECTRON ENG CO LTD
发明人
OYAMA KATSUMI;HIKIMA HITOSHI;TAKAMI KATSUMI
分类号
C23C16/50;H01L21/205;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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