RESIDUAL HALOGEN REMOVING METHOD FOR REACTION CHAMBER CONSTITUENT MEMBER,申请号JP19870333556-传众专利搜索

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发明名称	RESIDUAL HALOGEN REMOVING METHOD FOR REACTION CHAMBER CONSTITUENT MEMBER
摘要
申请公布号	JPH01173723(A)	申请公布日期	1989.07.10
申请号	JP19870333556	申请日期	1987.12.28
申请人	KYOCERA CORP	发明人	IWASAKI AKINORI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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