Method of producing superconducting thin films.

摘要

A method of preparing thin films with the high Tc superconducting composition Y1BA2Cu3O7- delta from a single ceramic target of the same composition, is described. The technique is based on Ion Beam Sputtering where the plasma generation process is remote from the substrate avoiding unwanted surface plasma interaction effects with the substrate (and growing film) that cause stoichiometry deviations from the target.