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发明名称
CONTACT FOR INSPECTING SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH01155279(A)
申请公布日期
1989.06.19
申请号
JP19870315839
申请日期
1987.12.14
申请人
NEC KYUSHU LTD
发明人
FUJISHITA TOSHIHIRO
分类号
G01R1/067;G01R31/26;G01R31/28
主分类号
G01R1/067
代理机构
代理人
主权项
地址
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