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发明名称
TREATMENT OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH01150328(A)
申请公布日期
1989.06.13
申请号
JP19870309051
申请日期
1987.12.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OGURA MOTOTSUGU;KAGAWA KEIICHI;YOKOGAWA TOSHIYA
分类号
H01L21/205;H01L21/304
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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