ION IMPLANTING APPARATUS,申请号JP19870306142-传众专利搜索

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法人/股东/高管

发明名称	ION IMPLANTING APPARATUS
摘要
申请公布号	JPH01146241(A)	申请公布日期	1989.06.08
申请号	JP19870306142	申请日期	1987.12.03
申请人	ULVAC CORP	发明人	FUJIKAWA HARUMA
分类号	H01L21/265;H01J37/04;H01J37/317	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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