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经营范围
发明名称
Process and apparatus for coating at least one object
摘要
申请公布号
EP0508359(B1)
申请公布日期
1996.10.09
申请号
EP19920105963
申请日期
1992.04.07
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
KUEGLER, EDUARD, DR. DIPL.-ING.
分类号
C23C14/34;C23C14/00;H01J37/34;(IPC1-7):C23C14/34;C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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