发明名称 FORMATION OF FILM RESISTOR
摘要 <p>PURPOSE:To make it possible to adjust a resistance value again, by forming a first film resistor on an integrated circuit substrate after trimming and connecting a second film resistor to the first film resistor in parallel and trimming the second film resistor so as to obtain a desired resistance value. CONSTITUTION:A first film resistor 2a is formed between electrodes 1a and 1a formed on an integrated circuit substrate. The first film resistor 2a is trimmed to provide a cut section 3a and a resistance value is adjusted by gradually increasing its length la. If the resistance value successfully reaches a desired resistance value, it is left as it is, but when the resistance value is above the desired resistance value, a second film resistor 2b is formed between electrodes 1b and 1b and the electrodes 1a and 1b are connected to electrodes 1a' and 1b' by a wining 4, respectively and the first film resistor 2a is connected to the second film resistor 2b in parallel. At this time, the resistance value of the second film resistor 2b is set so as to be higher than that of the first film resistor 2a. Thereafter, the second film resistor 2a is trimmed to provide a cut section 3b to adjust it so as to reach the desired resistance value by gradually increasing its length lb.</p>
申请公布号 JPH01133303(A) 申请公布日期 1989.05.25
申请号 JP19870291472 申请日期 1987.11.18
申请人 MINOLTA CAMERA CO LTD 发明人 TAKADA KENJI
分类号 H01L27/04;H01C7/00;H01C17/24;H01L21/822;H01L27/01 主分类号 H01L27/04
代理机构 代理人
主权项
地址