摘要 |
PURPOSE:To obtain in high efficiency a high-quality ceramic consisting of Si3N4 and/or SiC by heating at specified temperature, in an inert or reducible gas, a silicate of guanidine compound. CONSTITUTION:First, a silicate of guanidine compound is prepared by reaction, at 20 to 200 deg.C, between (A) a guanidine compound such as (1-methyl)guanidine, 1-phenylguanidine or 1-methylolguanidine and (B) a silicon oxide such as colloidal silica or a precursor capable of forming a silicon oxide (e.g., (di)silane) in the molar ratio A/B=10-1/1-10. Thence, this compound is heated at >=1200 deg.C for 1 to 6hrs in an inert or reducible gas (e.g., N2, H2, NH3) to be converted into the objective ceramic. |