| 摘要 |
PURPOSE:To make it possible to freely control the thickness of an optical waveguide without causing defects such as the peeling of a film from a substrate and the cracking of the film by repeatedly coating the substrate with a soln. prepd. by hydrolyzing metal alkoxide. CONSTITUTION:When a substrate is coated with a soln. prepd. by hydrolyzing one or more kinds of metal alkoxides, a sol coating film is first formed on the substrate and dried, and similar stages are repeated plural times. The interface between the films disappears, the peeling of the resulting film from the substrate and the cracking of the film are prevented and the thickness of an optical waveguide can be simply and easily controlled. |
