| 摘要 |
<p>PURPOSE:To transfer a wafer without damaging the wafer by providing a wafer fixing guide at a stage for placing a wafer holder. CONSTITUTION:A wafer fixing guide 9 is provided on a stage Al. Thus, the position of a wafer holder A5 is specified, and wafers 10 are simultaneously inserted one by one into the wafer insertion grooves 9a of the guide 9. Thereafter, when the wafers 10 are inserted by a wafer supporting rod 4 from the holder A5 into a holder 3, the wafers 10 are always inserted one by one to the wafer guide of the holder 3, thereby eliminating troubles for damaging the wafer 10.</p> |
