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发明名称
HETERO STRUCTURE FORMING METHOD
摘要
申请公布号
JPH01117016(A)
申请公布日期
1989.05.09
申请号
JP19870273251
申请日期
1987.10.30
申请人
NEC CORP
发明人
ANAMI TAKAYOSHI;ONABE KENTAROU;IDE YUICHI;NISHI KENICHI
分类号
H01L21/203;C30B23/08
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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