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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01107552(A)
申请公布日期
1989.04.25
申请号
JP19870265132
申请日期
1987.10.20
申请人
OKI ELECTRIC IND CO LTD
发明人
NARA AKIHIKO
分类号
H01L21/205;H01L21/76
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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