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发明名称
摘要
申请公布号	JPH0122154(B2)	申请公布日期	1989.04.25
申请号	JP19800021950	申请日期	1980.02.23
申请人	TDK ELECTRONICS CO LTD	发明人	NAGANO KATSUTO
分类号	H05K3/28;B41J2/335;C01B35/00;C01B35/14;C23C16/38;H01C1/02;H01L21/314;H01L27/01	主分类号	H05K3/28
代理机构		代理人
主权项
地址

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