Effecting accurate micro-manipulating

摘要

Substrate (18) is held in a manner such that it is isolated from vibrations, and a tube (21) with a metal coated end tapered to a very thin outlet is moved in all three dimensions relative the substrate while a predetermined radiation, electron beam, chemical, genetic material, or a sound wave is applied via the tube to the surface of the substrate in a required pattern, the spacing between the tube end and the substrate being such as to avoid diffraction. - Tube can be used for applying genetic material to a cell, a chemical or thermal energy for ablating a pattern, e.g. in a mask for microelectronics, applying a catalyst, for the direct production of microelectronic circuits, making holes in a substrate or directing a laser beam. A tunnelling current may flow between the tube and substrate. The substrate may be moved relative the tube to control the pattern.