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发明名称
MOLECULAR BEAM CRYSTAL GROWTH METHOD FOR III-V COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH01101622(A)
申请公布日期
1989.04.19
申请号
JP19870258442
申请日期
1987.10.15
申请人
NEC CORP
发明人
MIZUTANI TAKASHI
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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