| 摘要 |
PURPOSE:To manufacture a superconductor thin film of a definite composition with good reproducibility by a method wherein a target substance whose constitutive elements are La, Ba, Cu and O containing La, Ba and Cu in specific ratios. CONSTITUTION:A target to be used to deposit a thin film on a substrate by evaporating a target substance while the target is irradiated with a pulsed laser beam is substance whose constitutive elements are La, Ba, Cu and O. When the total number of atoms of La, Ba and Cu per unit volume is 100% for a composition of the target, the number of atoms of La at 10-30%, the number of atoms of Ba at 20-40% and the number of atoms of 40-60% in terms of their ratios are contained. When the pulsed laser beam is irradiated only for a duration of an extremely short pulse width, evaporation is caused in the ratios of the atoms which are nearly equal to the composition of the target; accordingly, it is possible to obtain the thin film whose composition is identical to that of the target. |
