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发明名称
VACUUM PUMP
摘要
申请公布号
JPS6480786(A)
申请公布日期
1989.03.27
申请号
JP19870234811
申请日期
1987.09.21
申请人
HITACHI LTD
发明人
AKIBA MASAKUNI
分类号
F04C18/16;F04C18/08;H01L21/205
主分类号
F04C18/16
代理机构
代理人
主权项
地址
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