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发明名称
MANUFACTURE OF MOS TRANSISTOR
摘要
申请公布号
JPS6477169(A)
申请公布日期
1989.03.23
申请号
JP19870232476
申请日期
1987.09.18
申请人
FUJITSU LTD
发明人
SATO YASUHISA;SAITO TSUTOMU
分类号
H01L21/3213;H01L21/28;H01L21/336;H01L29/78
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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