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发明名称
MANUFACTURE OF MIS-TYPE SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6473675(A)
申请公布日期
1989.03.17
申请号
JP19870231603
申请日期
1987.09.14
申请人
NEC CORP
发明人
KOMATSU MICHIO
分类号
H01L21/265;H01L21/336;H01L21/8234;H01L27/08;H01L27/088;H01L29/78
主分类号
H01L21/265
代理机构
代理人
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地址
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