摘要 |
PURPOSE:To decrease the reflection of light on the surface of a transparent plate by forming 3 layers of conductive antireflection films consisting of a metallic film of titanium or the like having a specific thickness as well as high-refractive index and low-refractive index dielectric films each having a specific refractive index and specific film thickness on the transparent substrate having a specific refractive index. CONSTITUTION:The metallic film 13 of any one metal among titanium, chromium, zirconium, molybdenum and nickel-chromium alloy which has 20-60Angstrom film thickness and allows easy formation of a thin continuous film is formed on the transparent substrate 11 consisting of float glass, etc., and having 1.45-1.60 refractive index to impart an electrical conductivity thereto. The high-refractive index dielectric film 14 of titanium oxide, etc., having 1.90-2.50 refractive index and 200-400Angstrom film thickness and the low-refractive index dielectric film 15 of silicon oxide, etc., having 1.35-1.50 refractive index and 700-1200Angstrom film thickness are successively formed thereon to constitute the conductive antireflection films. The reflection of the light on the surface of the transparent plate 1 is thereby decreased. |