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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6461930(A)
申请公布日期
1989.03.08
申请号
JP19870219812
申请日期
1987.09.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
HAYASHIDE YOSHIO
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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