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发明名称
DIFFUSION OF IMPURITY
摘要
申请公布号
JPS6453415(A)
申请公布日期
1989.03.01
申请号
JP19870209819
申请日期
1987.08.24
申请人
OKI ELECTRIC IND CO LTD
发明人
KATO TAKAO
分类号
H01L21/225
主分类号
H01L21/225
代理机构
代理人
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