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经营范围
发明名称
WERKWIJZE VOOR ETSEN DOOR MIDDEL VAN EEN PLASMA.
摘要
申请公布号
NL183974(C)
申请公布日期
1989.03.01
申请号
NL19740006222
申请日期
1974.05.09
申请人
ITT INDUSTRIES, INC. TE NEW YORK, NEW YORK, VER. ST. V. AM.
发明人
分类号
C23F4/00;G03F7/40;H01L21/302;H01L21/3065;H01L21/311;H01L21/312;(IPC1-7):H05H1/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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