| 摘要 |
PURPOSE: To uniformly spray an atomized liquid on a working plate by reflecting the ultrasonic waves supplied from a piezoceramic thickness vibrator to a metal body by the parabolic reflector surface of a substrate, converging these waves to the region of the working plate, bringing the waves into collision against the working plate and reflecting the waves toward the peripheral edge thereof. CONSTITUTION: The piezoceramic ultrasonic vibrator 7 is formed as a vibrator operating with thickness resonance. The disk-shaped substrate 2 of the vibratable rotation-symmetrical metal body 2 is provided with the parabolic reflector surface 4 facing the flat plane 3 perpendicular to the symmetry axis 10 of the substrate 2. Further, the central point of the working plate 6 formed to a tray shape or bowl shape is so set as to exist at the focus F1 of the parabolic reflector surface 4 or near the focus. Consequently, the uniform spraying of the atomized liquid on the working plate 6 is made possible and such aerosols that >=50% of the atomizable liquid volume turn to liquid drops having a diameter of <=15μm may be produced by excitation power of <=20 W.
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