| 摘要 |
PURPOSE:To make such a stable secondary electron image that has no fluctua tion even in case of a high magnification observation against an external field noise and an electromagnetic wave securable by installing a Y-Ba-Cu-O supercon ductor plate in a sample chamber, and also installing a cooler so as to cool this superconductor plate. CONSTITUTION:There are provided with a Y-Ba-Cu-O superconductor plate 7 and a cooler 10, and the inside of the sample chamber of a scanning electron microscope is covered with the superconductor plate 7, cooling this plate 7. That is to say, the Y-Ba-Cu-O superconductor plate is installed in the sample chamber exhaust by a high vacuum of the microscope so as to surround a sample stage, and this plate is cooled by liquid nitrogen and a copper plate, whereby the superconductor plate shows its superconductive characteristic, and owing to its complete diamagnetic character, it completely shields a field noise and an electromagnetic wave, so that even at the time of performing a high magnification image observation at low accelerating voltage, a stable secondary electron image is securable. |
