| 摘要 |
PURPOSE:To make such a thin film that is high in superconductive transition temperature and excellent in film quality securable by setting an oxide containing a yttrium or lanthanum series element, barium and copper down as a target, and irradiating an exciting beam to this target for sputtering it. CONSTITUTION:An oxide containing at least one type element (a) in yttrium and lanthanum series elements, barium (b) and copper (c) is set down as a target, irradiating an exciting beam to it for sputtering, and an oxide film superconductized is formed on a substrate. In this oxide as material, an atomic ratio of (a), (b) and (c) is not restricted in particular, and such one that is a:b:c=0.5-3:0.5-3:1.5-5 in usual time, especially a:b:c=1:2:3-4.5 is optimum. And, as for the exciting beam, excimer laser (ArF excimer laser or a short wavelength of pulse laser is used after strong beam convergence. With this constitution, such an oxide superconductive film that is excellent in membranaceous quality and shows superconductivity at high temperature of a liquid nitrogen temperature or so is manufacturable. |
