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发明名称
METHOD OF CONTROLLING DISLOCATION
摘要
申请公布号
JPS6441226(A)
申请公布日期
1989.02.13
申请号
JP19870197665
申请日期
1987.08.07
申请人
NEC CORP
发明人
ONO HARUHIKO
分类号
H01L21/322;C30B33/00
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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