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发明名称
MULTICHANNEL TYPE VACUUM PUMP
摘要
申请公布号
JPS6441698(A)
申请公布日期
1989.02.13
申请号
JP19870196464
申请日期
1987.08.07
申请人
JAPAN ATOM ENERGY RES INST;MITSUBISHI HEAVY IND LTD
发明人
ABE TETSUYA;MURAKAMI YOSHIO;HIKITA KAZUO;OSAWA HARUSHIGE;OTANI YUJI;HATA SATOSHI
分类号
F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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