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发明名称
SPUTTER COATING
摘要
申请公布号
AU580734(B2)
申请公布日期
1989.02.02
申请号
AU19840029670
申请日期
1984.05.24
申请人
PAULINE Y. LAU
发明人
Z. XU
分类号
C23C8/36;C23C14/32;C23C14/48;C23C14/54;H01J37/32;(IPC1-7):C23C14/38
主分类号
C23C8/36
代理机构
代理人
主权项
地址
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