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发明名称
FOCUSED ION BEAM EXPOSING DEVICE
摘要
申请公布号
JPS6431340(A)
申请公布日期
1989.02.01
申请号
JP19870186930
申请日期
1987.07.27
申请人
FUJITSU LTD
发明人
ITAKURA TORU
分类号
H01J27/26;H01J37/08;H01J37/305;H01L21/027;H01L21/30
主分类号
H01J27/26
代理机构
代理人
主权项
地址
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