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发明名称
SEMICONDUCTOR PRESSURE MEASURING APPARATUS
摘要
申请公布号
JPS6427275(A)
申请公布日期
1989.01.30
申请号
JP19880170690
申请日期
1988.07.08
申请人
TOSHIBA CORP
发明人
KIMIJIMA SUSUMU;NODA RYUZO
分类号
G01L9/04;G01L9/00;G01L13/06;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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