发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To prevent a device from stopping operating due to an irrecognizable operation and to improve a working ratio, by installing an illumination system operated automatically by an output signal of a recognition camera and next by obtaining an optimum illumination position that a recognition camera can recognize automatically. CONSTITUTION:A lead frame 6 and a horizontal rotating plate 15 are disposed on states of parallel flat planes. When a chip 5 is provided with inclination alpha, a servo motor 14 is revolved to change a position of a lighting fixture 8 and it searches an angle theta that a recognition camera can recognize. When the motor is revolved to a fixed range and the angle is irrecognizable, then a horizontal rotary plate 15 is rotated also to search a recognizable position (r). When the recognition is realized, bonding is performed and a lead frame carrying line 20 is used to carry a lead frame 6, so that a second chip is recognized. At that time the servomotors 14 and 16 function to return the lighting fixture 8 to a position which is recognizable with the chip on a horizontal state. Hence a working ratio can be improved.
申请公布号 JPS6417434(A) 申请公布日期 1989.01.20
申请号 JP19870173305 申请日期 1987.07.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 EJIMA TAIZO
分类号 H01L21/60 主分类号 H01L21/60
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