| 摘要 |
<p>Quartz crucibles (710) as illustrated in Fig. 8 for the melting of silicon and ceramic substrates are coated with protective materials (710') or metals at least in part evaporated from an electrode (701,702) with which an arc is struck at low voltage and current to deposit material from the electrode (701 or 702) on the substrate in a vacuum chamber. The electrode (701,702) may be heated and the substrate (710) may be sandblasted and preheated. Specifically a method of coating a quartz crucible for use in the melting of silicon comprises the steps of juxtaposing a pair of electrodes, composed of at least one component of a material adapted to coat said crucible, with an interior surface of said crucible; evacuating the space in which said electrodes are juxtaposed with said surface and maintaining a fixed pressure during deposition; and striking an electrical arc between said electrodes at one end of each of said electrodes at a voltage in the range 30-60 volts and with a current in the range 50-90 amperes by intermittently bringing said electrodes into contact with one another and separating them, thereby depositing material evaporated from said electrodes substantially over said interior surface of said crucible. <IMAGE></p> |
