| 摘要 |
<p>PURPOSE:To directly and uniformly light an adjusting plate by transmitting light which branches from a main light system through plural reflecting members and lighting a reference material. CONSTITUTION:The laser light L which branches from the main lighting system is reflected by a mirror 10 provided outside a stage to travels through an optical path parallel to a Y axis, and further reflected by a mirror 30 provided on a Y state 20 to travel through an optical path parallel to an X axis. The laser light L which enters an X state 40 through a guide-in opening 50 passes through a stop 70 and is reflected by a mirror 90 to travels in parallel to a Z axis, thereby illuminating the pattern 100a of the adjusting plate 100 provided on the X stage 40.</p> |
