摘要 |
A circuit for the preionization and main discharge of a pulsed gas laser provides that the sparks intended for the preionization of the working gas have an independent switch function. Capacitive energy storage means 7, 8, 9, 10 are connected low-inductively to the spark electrodes 3, 4, 5, 6. The current flowing in the spark discharge is used selectively for the preionization by means of the spark or for generating a compressed high-voltage pulse. The compressed high-voltage pulse is applied as prepulse to the main electrodes to momentarily greatly increase the voltage obtaining between the main electrodes and thus initiate and supply a homogeneous main discharge.
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