BONDING LOAD CONTROLLING EQUIPMENT IN PELLET BONDING EQUIPMENT,申请号JP19870159818-传众专利搜索

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发明名称	BONDING LOAD CONTROLLING EQUIPMENT IN PELLET BONDING EQUIPMENT
摘要
申请公布号	JPS645020(A)	申请公布日期	1989.01.10
申请号	JP19870159818	申请日期	1987.06.29
申请人	TOSHIBA SEIKI KK	发明人	SATO YUICHI
分类号	H01L21/52	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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