| 发明名称 |
SURFACE WORKING METHOD OF OXIDE MATERIAL |
| 摘要 |
A method for working an oxide material, and preferably a ceramic oxide material, with a laser emission of an excimer laser and without the creation of damage layers includes pulsing the laser emission to be impinged on the material to be worked. |
| 申请公布号 |
JPS63313685(A) |
申请公布日期 |
1988.12.21 |
| 申请号 |
JP19880132512 |
申请日期 |
1988.05.30 |
| 申请人 |
SIEMENS AG |
发明人 |
DEIITAA BOIERURE;MIHIAERU AIETSUTO;HERUMUUTO TOOMAN;UORUFURAMU UERUJINGU |
| 分类号 |
B23K26/00;B23K26/40;B28B11/08 |
主分类号 |
B23K26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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