Photosensitive composition.

摘要

A photoresist pattern exhibiting high resolution for an i-line exposure and having a steep sectional profile can be formed by making use of a photosensitive composition comprising a cresol novolac resin and a sensitizer blended therewith wherein(i) the cresol novolac resin has a meta to para ratio of 50/50 to 70/30 and a standard polystyrene equivalent weight-average molecular weight of 5,000 to 50,000 and(ii) the sensitizer comprises an ester of 1-oxo-2-diazonaphthoquinone-5-sulfonic acid with 2,3,4-trihydroxybenzophenone and/or an ester of 1-oxo-2-diazonaphthoquinone-5-sulfonic acid with 2,3,4,4 min -tetrahydroxybenzophenone and the content of said sensitizer is 14 to 35 % by weight based on said polymer compound.