| 摘要 |
<p>Piezoelectric crystalline film of zinc oxide with a hexagonal crystal structure and a c-axis substantially perpendicular to the film surface, the crystalline film containing, as additive elements, vanadium and manganese together with or without copper. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency which can be used in a wide range of low to high frequencies. Such films can be made by a method comprising sputtering source materials, i.e., zinc oxide, vanadium and manganese together with or without copper onto a surface of a substrate to form a crystalline zinc oxide film, the sputtering being effected by using a film material source consisting essentially of a ceramic of zinc oxide containing vanadium, and manganese together with or without copper.</p> |
| 申请人 |
MURATA MFG. CO., LTD., NAGAOKAKYO, KYOTO, JP |
发明人 |
OGAWA, TOSHIO;MASHIO, TASUKU, NAGAOKAKYO, KYOTO, JP;NISHIYAMA, HIROSHI, MUKOU, KYOTO, JP |
