| 摘要 |
PURPOSE:To control the flatness of a module quantatively by a method wherein a Zx table and a Zy table to which the module is attached are displaced by piezoelectric devices. CONSTITUTION:A Zx piezoelectric device 4 is driven to apply its expansion force upward to a Zx table 2 through its top actuating point 12 and the table 2 is pushed up around a pin 8 against the force of a spring 10 to adjust the height to the X direction. A Zy piezoelectric device 3 is driven to apply its expansion force upward to a Zy table 1 through its top actuating point 11 and the table 1 is pushed up around a pin 7 against the force of a spring 9 to adjust the height to the Y direction. With this constitution, the flatness of a module 13 can be controlled quantatively.
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