| 摘要 |
PURPOSE:To efficiently recover the vapor of an org. substance such as trichloroethylene and to prevent the diffusion of the vapor into the atmosphere by providing a lid having a cooling part for cooling, liquefying, and recovering the vapor of an org. solvent at the upper part of a treating vessel contg. the org. solvent. CONSTITUTION:A vessel 13 contg. trichloroethylene 12, opened at the upper end, and made of quartz is provided on a heater 11, and a carrier 15 made of 'Teflon(R)' and holding arranged semiconductor substrates 14 is placed on the bottom in the vessel 13. The lid 17 made of quartz and having plural cooling fins 16 in the vertical direction is set at the upper opening of the vessel 13. The evaporated trichloroethylene is cooled by the cooling fins 16 and liquefied, hence the trichloroethylene can be recovered, and an increase of the pressure in the vessel can be prevented. In addition, the diffusion of the evaporated trichloroethylene into the atmosphere during boiling can be prevented, and the related environmental pollution can be obviated.
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