| 摘要 |
PURPOSE:To shorten changing time for a substrate as well as to improve the operation rate of a working machine by transferring a machined substrate from a stand-by unit to a feeder and the next work substrate from the feeder to the stand-by unit respectively at time of working, while constituting it so as to be transferred only between the stand-by unit and the working machine at time of substrate changing. CONSTITUTION:While a substrate is machined by a working machine A, the machined substrate discharged from the working machine A to a stand-by unit E is fed in a feeder B by a second transfer device D and a first transfer device C, and another substrate to be machined next is drawn out of the feeder B by the first transfer device C, then it is transferred to the stand-by unit E by the second transfer device D. And, when machining of the substrate by the working machine A is over, the machined substrate is transferred from the working machine A to the stand-by unit E and unmachined substrate from the stand-by unit E to the working machine A, respectively, by a third transfer device F. Accordingly, at time of substrate changing, the substrate is transferred between the stand-by unit E and working machine A so that substrate changing time for the working machine A is shortened, thus an operation rate in the working machine A is improvable.
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