| 摘要 |
PURPOSE:To enable exchange of a window without breaking the vacuum of a growth chamber by combining a window provided to the crystal growth chamber with a gate valve provided to a path of light and a means for evacuating a space between the window and the gate valve so as to attain a predetermined effect. CONSTITUTION:A window 5 is separated from a growth chamber 1 by a gate valve 6 provided to between the window 5 and a gate valve 6. An evacuating mechanism 8 constituted of an ion pump, rotary pump, and a sorption pump is connected interposing a valve 7 to a space between the window 5 and the gate valve 6 with a purpose for evacuating the space. During a crystal growth stage, the vacuum of the whole system is held with the ion pump 9 by closing the valve 7 and opening the gate valve 6. During a stage for exchanging the window 5, the vacuum of the growth chamber is held by closing the gate valve 6. When the exchange of the window is finished, the valve 7 is opened and the space between the window 5 and the gate valve 6 is evacuated with the evacuating mechanism 8, then the gate valve 6 is opened and the valve 7 is closed. Thus, molecular beam epitaxial growth can be commenced again.
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