| 摘要 |
PURPOSE:To enable the manufacture of the title device in a reduced manufacturing process and with an excellent yield, by a method wherein a piezoelectric element equivalent to a detecting element is disposed as a compensating element in proximity and in parallel to the sensor and signals from the two elements are detected differentially. CONSTITUTION:A driving element 27 is fixed to a fixed end 29a, and a sensor 31 is coupled thereto through the intermediary of a coupler 33 so that it intersects the plate surface of the element 27 perpendicularly. Moreover, a compensating element 35 is fixed to an fixed end 29b so that the plate surface thereof is parallel to the element 31. When the element 27 is made to vibrate freely in the direction of an arrow (d), a Coriolis force F''col generated by the rotation in the direction of an arrow (e) and a force F''EX due to a straight motion are applied to the element 31. Meanwhile, only the force F''EX is applied to the element 35. By detecting differentially electric charges applied to the elements 31 and 35, an adverse effect of external vibrations can be removed. Accordingly, the element 27 alone is made to vibrate freely in such a structure as the above, and therefore it is unnecessary therein to adjust the phase of vibrations by trimming or by selecting the piezoelectric element to be paired to the element 27. |
