| 摘要 |
PURPOSE:To obtain a superconducting element consisting of single crystal having excellent quality, by irradiating an oxide based superconducting material formed on a substrate with laser beams whose temperature in the central part is kept lowerly than that of the peripheral part. CONSTITUTION:An oxide based superconducting material 2 consisting of Ba- Y-Cu-O based thin film is formed in argon atmosphere containing oxygen on the substrate 1 consisting of TiSrO3 heated at about 400 deg.C by sputtering. When thickness of the thin film 2 is attained 3mu, the sputtering is stopped and laser beams whose temperature in central part is kept lowerly than that of the peripheral part is irradiated on the thin film 2 while moving XY stage to left. A part melted by irradiating the thin film 2 with laser beams is solidified from the central part toward the peripheral part and subjected to single crystallization, because the temperature of central part of the melt part is lower than that of the peripheral temperature. |
