| 摘要 |
PURPOSE:To simply form a thin film of a substance to be vapor-deposited on the inside of a tubular or hollow member made of a metal or nonmetal by putting the substance to be vapor-deposited in the member and heating the substance with laser light or electron beams to melt and scatter it. CONSTITUTION:A pipe 3 for guiding laser light from a laser oscillator 2 is connected to one end of a tubular member 1 made of a metal or nonmetal and a pipe 4 for evacuation is connected to the other end. A cylindrical substance 5 to be vapor-deposited is put in the member 1 so that it can be moved and rotated in the member 1 through a controller 6. The member 1 is evacuated by a vacuum pump connected to a pipe 4 and laser light 7 from the laser oscillator 2 is radiated on the tip of the substance 5. By the radiation, the tip of the substance 5 is melted and evaporated to form a thin film of the substance 5 on the inside of the member 1. Electron beams may be used in place of the laser light. The thin film can be very simply formed on the inside of the member 1.
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