| 摘要 |
PURPOSE:To detect an angular velocity with high accuracy from a phase variation of a vector of each voltage, by constituting the titled sensor so that a phase difference angle made by a vector of an output voltage by the angular velocity and a vector of an null output voltage at the stationary state becomes 90 deg., by an auxiliary driving means. CONSTITUTION:This sensor is provided with a detection side auxiliary driving piezoelectric element 25, in addition to piezoelectric elements 21-24 which are usually required for a driving detection, by which a null output voltage is held at a small stable value, and a phase difference to a component generated by a rotation of a vibrator 1 is set 90 deg.. Also, by combining the piezoelectric element 21 for driving and the piezoelectric element 23 for a feedback, an automatic vibrating circuit is constituted, and by connecting a driving side driving signal to the detection side auxiliary piezoelectric element 25, they are connected so as to generate a minute and stable null output voltage at the time of stillness. In this state, by a phase detecting circuit 42, a phase difference between a detecting signal and a driving signal is detected, and by amplifying its value by an amplifying circuit 43, an angular velocity can be detected with high accuracy. |
