| 摘要 |
PURPOSE:To suppress the generation of irregularity in resistance value by a method wherein a thermistor element is composed of a thermistor thin film and a pair of sandwich-structured electrodes provided in such a manner that a part of which is overlapped through the intermediary of the thermistor thin film. CONSTITUTION:Thermistor elements 121 and 122 are formed respectively on an insulating substrate 11, and these elements 121 and 122 are connected in parallel with each other. The element 121 is composed of comb-shaped electrodes 13a and 13b, which are formed by engaging comb-shaped parts, and the thermistor thin film 14, a part of which covers the comb-shaped part of the electrodes 13a and 13b. On the other hand, the thin film 122 is composed of an H-type lower electrode 15a, a thermistor thin film 16, a part of which is covering the electrode 15a, and an H-type upper electrode 15b, a part of which is overlapped with the electrode 15a through the intermediary of the thin film 16. The electrode 15a, the thin film 16 and the electrode 15b are formed in sandwich structure. The effect of distribution of film thickness on the distribution of resistance value is reduced remarkably by having the above-mentioned constitution, and the irregularity in resistance value can be suppressed.
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